Residual Stress Tester
In case thin film has compressive stress or tensile stress, the residual stress of thin film can be calculated by measuring the deformation curvature of substrate/thin film compound.
If the Young’s modulus, Poisson’s ratio, thickness of thin film, and the thickness and curvature of the coated substrate are known, the residual stress of thin film can be found by using Stoney formula.
• Automatic control of X-Y axis
• Calculation of residual stress by using the curvature of thin film and the Stoney Formula
(No need for lattice constant. Able to measure residual stress of thin film in amorphous state)
• Simple operation of device