Filtered Cathodic Vacuum Arc
Filtered Vacuum Arc is able to evaporate the material of cathode by using arc discharge and deposit this material on the substrate.
The biggest problem in arc deposition is the droplets (macro particles) formed, which can reach up to a few μm in size. These droplets adversely affect the property of thin films, especially the surface morphology.
By filtering macro and neutral particles, this system improves the overall properties, such as hardness, surface morphology, and etc.